Abstract: An ultrasensitive pressure sensor integrated thin-film transistor (TFT) was fabricated by using In-Sn–Zn-O (ITZO) thin film as an active channel layer and hydrothermally grown ZnO nanorods ...
Abstract: In wafer etching, regular cleaning and maintenance of process chambers are necessary to reduce particle contamination of etched wafers during the wafer transfer process. Investigating ...