Abstract: This paper presents a new electrostatic resonant accelerometer with force-rebalance control. Conventional electrostatic resonant accelerometers detect acceleration based on the modulation of ...
Abstract: A novel structure was presented for a microelectromechanical system (MEMS) piezoresistive (PZR) accelerometer. Taking the advantage of the effects of the tiny piezoresistive beam (TPB) to ...
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